From the fabrication of diesel fuel injectors to patterned semiconductor wafers, surface metrology on the microscopic scale is an essential step in precision manufacturing and production.
BELLINGHAM, Washington, USA , and CARDIFF, UK (PRWEB)
April 28, 2017
Researchers from Zygo Corporation are recipients of the Rudolf Kingslake Medal and Prize for 2016. The award is presented annually to the most noteworthy original paper published in the journal Optical Engineering by SPIE, the international society for optics and photonics.
Peter de Groot and James Biegen are the authors of “Interference microscope objectives for wide-field areal surface topography measurements,” published with open access in the July 2016 issue of the journal. The award will be presented at a banquet during SPIE Optics and Photonics in San Diego, California, in August.
From the fabrication of diesel fuel injectors to patterned semiconductor wafers, surface metrology on the microscopic scale is an essential step in the precision manufacturing and production of many modern products. To increase the field of view on current state-of-the-art microscopes for interferometry, multiple obstacles must be addressed, including the size, weight, and form factor of classical interference objectives.
The researchers propose a type of low-magnification interference objective that extends the range of application for flexible microscope platforms to larger fields of view. They write, “The objective comprises a beam splitter plate and a partially transparent reference mirror arranged coaxially with the objective lens system. The coaxial…